Zhiyan,

Make PR thinner may help.

Li



>From: Zhiyan Liu 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] Patterning of  In coated surface
>Date: Wed, 08 Dec 2004 11:26:12 -0700
>
>Dear friends
>
>I am wondering if anybody has experience on pattern In coated GaAs surface.
>I coated the GaAs surface with 1um of In, and then try to pattern it. I use
>the positive PR shipley 1818 and expose to UV light. But i can't get a
>sharp pattern, the edges are smear out. If anybody has suggestion, i really
>appreciate it.
>
>Thank you very much,
>Zhiyan
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