To mems guys

these days I've been measuring the capacitance change of the micromachined
parallel plate and shunt switch. The analytical values and simulated one are
very closed, and turned out to be around a few picofarad. However, the
experimental values via HP 4284A are very unstable and inconsistent ones due
to parasitic capacitance from many sources like probe tip/station or
something.

Would you please give me your know-how to reduce the parasitic capacitance
in order to get accurate capacitance?

I apprecaite your help in advance.

jay

_________________________________________________________________
Don’t just search. Find. Check out the new MSN Search!
http://search.msn.click-url.com/go/onm00200636ave/direct/01/