Hi Ning,
We use a tool from Primaxx for our HF vapor release process.  It works
well and the company is very helpful with respect to process and
maintenance help. Their website is:

www.primaxxinc.com

Good luck
Doug



Doug Stewart
Equipment Maintenance Supervisor
Infotonics Corporation
5450 Campus Drive
Canandaigua, NY 14424
(585) 919-3068
[email protected]


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Subject: MEMS-talk Digest, Vol 26, Issue 13

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