hi doug,
thanks for the information. are you doing R&D or production? how's the
uniformity across the wafer and also the wafer to wafer uniformity? Primaxx
claims to have 5% non-uniform. just wonder if that's what you are seeing.
cheers,
Ning
-----Original Message-----
From: Doug Stewart [mailto:[email protected]]
Sent: Monday, December 13, 2004 10:17 AM
To: [email protected]
Subject: [mems-talk] RE: HF Vapor releasing
Hi Ning,
We use a tool from Primaxx for our HF vapor release process. It works
well and the company is very helpful with respect to process and
maintenance help. Their website is:
www.primaxxinc.com
Good luck
Doug
Doug Stewart
Equipment Maintenance Supervisor
Infotonics Corporation
5450 Campus Drive
Canandaigua, NY 14424
(585) 919-3068
[email protected]
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
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Sent: Monday, December 13, 2004 12:02 PM
To: [email protected]
Subject: MEMS-talk Digest, Vol 26, Issue 13
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