-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Borski, Justin
Sent: Thursday, December 16, 2004 9:50 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Elevated temperature acetone bath for metallic
liftoff process

Hi Thomas,

You would be better served safety-wise by running an NMP-based process.
You
can safely run NMP solvent up to 70 degrees C without too much worry.
And
you should do this in an all-metal station.

- Justin

Justin,

Thanks very much. I've ordered a liter of it from VWR and will try it
Monday. Any advice on the temperature - the Cleanroom temperature is ~20
C or less. What do you mean by an all-metal station? I'm an external
user at U-Del ECE's Cleanroom - their fumehoods are the white plastic
that I suppose is resistant to HF and other acids (which I don't use
myself). I will definitely not use the ultrasonic bath.