Hello everyone,

Does anyone use profilometer for film thickness measurement  Tencor Alpha-step
200 ?
Is there some kind of PC control software for this device?


Pawel Janus

Pawel Janus
Institute of Electron Technology
al. Lotnikow 32/46
02-669 Warsaw
Poland

tel. +48 22 716 59 90
fax. +48 22 716 59 91