Hi there,

> I am starting work on deposition PZT thin film by sol-gel on
> platinized Si substrate. can some body help me in giving some tips on
> cleaning of Platinized Silicon substrate or any literature regarding
> same. My substrate is Pt(111) on Si(001).

Typically the wafers would be cleaned with acetone first and then 2-
propanol afterwards. Before you start spin-coating though, you should
also anneal the wafers.

With regards,

Kai