Hello,

We have some mems chips including planar inductors, we calculated their
inductance values and find numbers about 10nH to 20nH. Now my problem is
to measure them, but we do not know a way to measure such small values.
We will be glad if you propose a method to measure them. Thanks in
advance.

Yalcin Alper Eken
Junior Student
Middle East Technical University
Electical and Electronics Engineering Department
[email protected]