For film thicknesses alone, one could use an AFM (just a small nick with
a razor gives a surprisingly good result for metal films) .... I've had
mixed results using a profilometer. Another way would be to use a
precision electrobalance (i.e., Cahn G-2 with 50-ng sensitivity) in a
differential mode; weigh before and after an etch removal, and use the
density of PMMA to compute film thickness. That's worked for me as well
with metal films and provides a good average over a large area. Hope
that helps.

Dr. Wilson

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Clements, Jim - Erie
Sent: Monday, January 03, 2005 1:14 PM
To: Aashish Singh; General MEMS discussion
Subject: RE: [mems-talk] measuring film thickness and Refractive index
afterspin coating

Ellipsometry would be the most appropriate.
Some vendors might do a sample gratis, but you'd need to ask.
Hope this helps.
Jim

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Aashish Singh
Sent: Monday, January 03, 2005 8:14 AM
To: [email protected]
Subject: [mems-talk] measuring film thickness and Refractive index after
spin coating



Dear friends,
  I have spin coated a thin Layer of PMMA over Quartz block in my
laboratory. I want to measure the film thickness and Refractive index,
can anybody suggest some way of doing it.
   Your help will be heartly appreciated.

regards
Aashish Singh
Project Associate
Department of Physics
Indian Institute of Technology, Delhi
New Delhi-16
INDIA
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