Paddy, how thick and uniform do you need the coating to be. Gary
-----Original Message-----
From: li xuan [SMTP:[email protected]]
Sent: Monday, January 10, 2005 4:14 PM
To: [email protected]
Subject: [mems-talk] how to coat a large (40inch*50inch) plate
Dear All,
Now I need to coat photoresisit on a big glass plate
for shot hologram. I try use dip coating way. It is
just like use two big plate make sandwich. then pump
in and pump out photoresist. the bottom 60% looks ok,
but the top 40% have some kind of funny shape. Does
anybody have some idea to coat that large plate.
Thanks!
Paddy
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