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MEMSnet Home: MEMS-Talk: how to coat a large (40inch*50inch) plate
how to coat a large (40inch*50inch) plate
2005-01-10
li xuan
2005-01-10
Gary
2005-01-11
li xuan
2005-01-10
[email protected]
2005-01-11
Brubaker Chad
how to coat a large (40inch*50inch) plate
[email protected]
2005-01-10
Depending on the resolution you need I think a number of paint shops could help
you out. The advantage should be descent uniformity as the solvent will be
exhausted away quicker than the dip method. Be sure to take a nice black box to
place your substrate into after coating to prevent exposure from transport to
and from your facility. A better method I have seen is a type of minicus coater
that uniformly spreads out the resist while the substrate moves controllably
under the miniscus that is created by the tube that dispenses the resist. by
varying the speed of the substrate you can control the thickness and it avoids
the problems of spinning with edge thickness build-up you get with square
substrates. Bob Henderson

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