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MEMSnet Home: MEMS-Talk: lift-off
lift-off
2005-01-11
Li Wang
2005-01-11
Isaac Wing Tak Chan
2005-01-12
Oliver Horn
2005-01-11
Kory Hall
lift-off
Li Wang
2005-01-11
Dear colleague,

I tried to make Ni pattern with lift-off. I used AC for pretty long
time (30 min, 100W, 20 mT). After I immersed the wafer into aceton,
the PR can not be washed away even with Ultrasonic. The PR is
obviously still there because I can see patterns on the PR layer. Can
I use PR stripper instead of aceton? Is stripper compatible with Ni?
I really appreciate if you can share you experience with me. Thank you
very much for help in advance.

Lee

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