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MEMSnet Home: MEMS-Talk: lift-off
lift-off
2005-01-11
Li Wang
2005-01-11
Isaac Wing Tak Chan
2005-01-12
Oliver Horn
2005-01-11
Kory Hall
lift-off
Oliver Horn
2005-01-12
Hi,

did you measure the temperature or the bias-voltage during deposition?
In my experience Ni gets a very high bias-voltage, up to 2000 V. This
leads to a high temperature on your substrate, which would harden the
photoresist.

Perhaps you could try less power or substrate movement to keep it cool.

Best regards,

Oliver Horn

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