Hello Thorsten,

typically the parameters for SU8 to SU8 bonding are as follows:T=100°C,
F=1000N (process under vacuum). A good bond result can be also achieved by
using different temperature steps in the bonding process. Also the
pretreatment of the SU8 - prebake, exposure, post exposure and relaxation
time - are very important steps to get a good bond result of SU8. An uniform
pressure and heat is neccessary to achieve a good bond result, of course.

I did already a lot of SU8 bondings with good success and I would like to
share my knowledge with. Due to the size of the files I am going to send it
directly to you.

Best Regards,
Margarete Zoberbier