Tank a look at the following paper:

S.K. Sampath, L.St.Clair, Xingtao Wu, D.V. Ivanov, Q. Wang, C.Ghosh, and
K.R.Farmer, "Rapid MEMS Prototyping Using SU-8, Wafer Bonding and Deep Reactive
Ion Etching,: Proceedings of the 14th Biennial University/Government/Industry
Microelectronics Symposium, Richmond, VA, June 17-20, 2001 - IEEE Catalog No.
01CH37197

Loren St. Clair