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MEMSnet Home: MEMS-Talk: RE: Spam:[mems-talk] TaN
RE: Spam:[mems-talk] TaN
2005-01-12
Matthew Coda
RE: Spam:[mems-talk] TaN
Matthew Coda
2005-01-12
Reade materials offers it and implies, on their web site, the
possibility of direct evaporation.  You should contact a vacuum
materials supplier (Reade, Lesker, etc.), they'll probably be able to
hold your hand up to the point of a bare bones process at which point
you'd be on your own.

Good luck,
Matt

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