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MEMSnet Home: MEMS-Talk: MEMS packaging
MEMS packaging
2005-01-13
Vikram Patil
MEMS packaging
Vikram Patil
2005-01-13
Hi All!
I have few questions about the properties and application of FOTURAN glass
in MEMS packaging.
I am new to MEMS packaging and gathering some information for my bonding
experiments.
I want to know following things..
1. Does FOTURAN glass is used for MEMS packaging? if yes then any particular
reasons?
2. What different transparent materials can be used for MEMS packaging? Do
these materials need to possess any particular properties?
I would really appreciate if anyone can help me with my questions.
Thank you.

Vikram



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