MEMS-talk

News	MEMSnet Home: MEMS-Talk: how to etch SiN mask by wet etching? how to etch SiN mask by wet etching? 2005-01-13 NL 2005-01-13 Rana, Mukti M 2005-01-13 Transene 2005-01-13 Isaac Wing Tak Chan 2005-01-13 Kory Hall 2005-01-16 Kirt Williams how to etch SiN mask by wet etching? Isaac Wing Tak Chan 2005-01-13 Dear LeiNie, I would prefer to use BHF solution at room temperature with 20:1 volume ratio of NH4F to HF. Yours sincerely, Isaac Chan University of Waterloo reply
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