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MEMSnet Home: MEMS-Talk: TiW properties?? High Temp stability??
TiW properties?? High Temp stability??
2005-01-14
rohit bhosle
TiW properties?? High Temp stability??
rohit bhosle
2005-01-14
I am trying to create a structure on a ceramic substrate which could be
stable upto 1000 deg C! So far I have tried Tungsten as thick film, but that
has the limitations on the structure size (150 micron smallest).

I was interested in finding out if there are any other metal chemistry out
there which could be structured on Ceramics and would withstand high
temperatures upto 1000 - 1100 deg C.

I was trying to find out if Ti-W would serve the purpose without the Au
layer on top, but could not find any literature for the same. Could anyone
answer the question regarding the thermal stability of TiW structures?

Thank you all in advance,

Rohit

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