Ni and Co depositon by Sputtering/Evopoartion process
Pradeep Dixit
2005-01-17
Hi all,
Does any one has tried to deposit Ni or Cobalt through E-beam
evoporation/Sputtering process. I need to deposit 25 nm of Ni / Co on
my wafers.
Please let me know about the process parameters.
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Thanks,
Pradeep Dixit
Research Student,
Micromachine Center,
NTU Singapore - 639669