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MEMSnet Home: MEMS-Talk: RE: polymers for intermediate wafer bonding
RE: polymers for intermediate wafer bonding
2005-01-17
Zoberbier, Margarete
2005-01-17
Shile
RE: polymers for intermediate wafer bonding
Shile
2005-01-17
Could someone suggest an adhesive for bonding wafers that that can be
patterned and will survive ~24 hr in 25% TMAH at 80degC. The material
should solidified before bond so the wafers can be aligned without
making a mess.

I have used Protek from Brewer Science, but Protek can't be patterned
before etch.  I have also had some success with unexposed SU8, but the
exposed SU8 peels in TMAH.

Roger Shile

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