Dear Colleague,

I want to make two metal layers Al/Cr as thermopile. The first layer
is Al deposited with sputtering and etching. The second layer is Cr
with sputtering and lift-off. After the process, I measured the
electrical resistance of thermopile but found unconnected (or
extremely large electrical resistance). From the calculation, there
should be electrical resistance of about 100 Kohms. I'm just wondering
if I have miss some steps with the process. One suspicion is that I
should get ride of the Al oxide which is very easy to creat after Al
deposition and patterning. Otherwise the oxide will disconnect the
contact between the two metals. Did anybody meet this kind of problem
before? I'm really appreciate your help.

Thanks
Li