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MEMSnet Home: MEMS-Talk: Photoresist pattern on PDMS
Photoresist pattern on PDMS
2005-01-04
Hongjun-ECE
2005-01-05
Z.,W.Y.(Lydia)
2005-01-19
Miao LIU
2005-01-20
Hongjun-ECE
wafer bonding
2005-01-20
li cai
2005-01-21
Hongjun-ECE
2005-02-03
Miao LIU
Photoresist pattern on PDMS
Miao LIU
2005-01-19
Hello Lydia,

   I am using Sylgard 184 too. But when I deposite a thin layer of aluminum
using evaporation method, the Al layer I got also has some thin cracks. Maybe it
is caused because of the temperature. Can you share the method how you make the
aluminum layer without cracks and acting like a mast? Thank you!

Best regards,

Licca

[email protected]
2005-01-19


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