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MEMSnet Home: MEMS-Talk: photoresist layer for protecting biomolecule during oxygen plasma
photoresist layer for protecting biomolecule during oxygen plasma
2005-01-21
WANG,HONG
photoresist layer for protecting biomolecule duringoxygen plasma
2005-01-21
Adrian Brozell
photoresist layer for protecting biomolecule during oxygen plasma
WANG,HONG
2005-01-21
I want to immobilize some DNA on glass slide, then seal the glass
slide and a PDMS channel with oxygen plasma processing (so the DNA
is in the channel after sealing). To protect the DNA during the
oxygen plasma, can I protect it with photoresist? Anyone has
experence? What is the proper photoresist? What is the proper
thickness? Any reference paper?
Thanks.



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