Hi,
I checked the archives and was not successful in locating a record which gave a
solution to my problem.

I have two layers of PDMS, each about 2 mm's thick ( I have cast on a 4" wafer
with 15ml of Sylgard 184). I cure the PDMS in convectional over for about a hour
at 60 degrees. I use O2 plasms at 0.027KW for 1 min. The layers did not bond at
all. You could easily separate them apart. I then sonicated both layers in
Ethanol for about 10 minutes and then blow dried with N2, and then heated in the
over for about 15 mins, and did the plasma treatment again, only to find the
same result as before.

There are a couple of questions that I need answer to:
1) Is the power that I am using for plasma treatment good enough. Can you
recommend and easy to understand literature about this
2) Is there a way to find if the plasma is actually firing. we have a plasma
cleaner from Yield engineering services, and I could not locate a window of some
sort to see if the plasma is being fired.
3) I also want to know if 1 hour of curing time in convectional oven at 60
degree is sufficient enough.


Hope to get a response from you folks soon.

Thanks a bunch in advance,
Vishwa

Vishwanath Somashekar