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MEMSnet Home: MEMS-Talk: Resistivity of W
Resistivity of W
2005-01-24
M Suk
2005-01-28
Kirt Williams
2005-01-24
David Metacarpa
Resistivity of W
David Metacarpa
2005-01-24
Tungsten (or Wolfram as some call it) can typically have res values around
17uOhm-cm deposited by PVD. Poor background partial pressure levels can increase
this value.

David Metacarpa

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