Dear Haroon,

Here is a link of an article where you can find all the relevant
information:
http://dx.doi.org/10.1016/j.optmat.2003.12.004   (joural site)
http://www.fen.bilkent.edu.tr/%7Eay/publications/JOM_FAY.pdf (pdf file)

You should pay attention on dilution of precursor gases, power, and flow
rates and then adapt these parameters to your system.

Regards,

Feridun Ay
Bilkent University