Hi;
I'm looking for a polymer films which I can use as etching mask in acid
chemical(consisted of HNO3,HF,Acetic acid).
I have tried with parylene and the problem is adhesion eventhough I use
adhesion promotor.(it peels up within 10 mins).   And As I know,
polyimide films has same adhesion problem.
Does anybody know other kinds of polymer films which has good adhesion
with silicon in acid or the way to increase the adhesion between
polyimide or parylene and silicon?
Any information would be welcomed.
Thanks.