Hi, all,
   I am currently developing a MEMS fabrication process utilizing
in-situ boron-doped CVD diamond thin film as structural layer. Does
anybody know where we could possiblilty find "CMOS-compatible" diamond
reactive ion etching (RIE) facility or service?  The "CMOS-compatibility"
is crucial, since all of the subsequent processes have to be done using
"CMOS-compatible" facilities. Thanks a lot.


Jing