A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Place for DRIE of Pyrex Wafer
Place for DRIE of Pyrex Wafer
2005-01-27
Oguz Elibol
Place for DRIE of Pyrex Wafer
Oguz Elibol
2005-01-27
Dear list members,

I am looking for a place to get 4 inch Pyrex 7740 wafers deep reactive
ion etched. The etch should go through the wafer (wafer thickness 500
microns). The sidewall angle is not very critical as long it is
repeatable and has a known value (doesn't have to be 90). Could you
please reply to me if your institution is capable of doing this or you
know a place that can do this in a reasonable amount of time? Thanks a
lot..

Regards,

Oguz

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
The Branford Group
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation