MEMS-talk

News	MEMSnet Home: MEMS-Talk: wet etch of SiO2 or SiC selective to NiSi/CoSi2 wet etch of SiO2 or SiC selective to NiSi/CoSi2 2005-01-27 [email protected] wet etch of SiO2 or SiC selective to NiSi/CoSi2 [email protected] 2005-01-27 Hello, Did you find a solution to etch SiO2 without etching NiSi? I tried buffered HF but it didn't work. Yours sincerely Michael Grieb reply
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