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MEMSnet Home: MEMS-Talk: Resistivity of W
Resistivity of W
2005-01-24
M Suk
2005-01-28
Kirt Williams
2005-01-24
David Metacarpa
Resistivity of W
Kirt Williams
2005-01-28
I sputtered tungsten films over a range of pressures, them measured
thickness and sheet resistance to calculate resistivity.
I also annealed at 900 and 1000 C and remeasured.
All samples were in the range of 15 to 25 micro-ohm-cm, so your value of 20
is just what I'd expect.
    --Kirt Williams

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