Hi Amani,
Self-assembled monolayers (SAMs)are widely used as an anti-stiction coating
for MEMS, microcontact printing and other applications. Applied
Microstructures manufactures a tool for SAMs deposition in a vapor phase.
We also developed some special techniques to make release layers more
durable. You may contact me for further information and arrange some
demonstration experiments.
Boris Kobrin
(408) 594-0654
[email protected]
www.appliedmst.com