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MEMSnet Home: MEMS-Talk: Etchant for AlAs in PHEMT
Etchant for AlAs in PHEMT
2005-01-29
tks-c
2005-02-01
[email protected]
Etchant for AlAs in PHEMT
[email protected]
2005-02-01
BHF and HF are totally selective in this system. Also HCl should work.

-Jukka
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