Hello mems-talk,

Also I am looking for this kind of materials. Did any of you guys have related
paper about the modeling? I found one which is some related to circular shape
"Analytical static modelling and optimization of electrostatic micropumps" J.
Micromech. Microeng. 7 (1997) 183-185
http://ej.iop.org/links/q69/8o0mvEtibWACODfmOv,2NQ/jm7326.pdf
But what I am most interested in rectangular shap. Does anyone have this kind of
modling information?

Best regards,

Miao LIU
[email protected]
2005-02-03