Hello there,

Here's my situation. I would like to deep etch a non-processed silicon wafer
which is sit on a patterned PYREX wafer.
There is no structure on the silicon wafer at all, just bare silicon wafer.
How can I align the deep-etch pattern to the
metal pattern on the PYREX wafer? Can it be done by a IR double-sided
photolith aligner? Any suggestion, please fill free!

Cheers,
Badin