A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: R-reading of bare Au-electrode
R-reading of bare Au-electrode
2005-02-14
Bubphamala, Teerada
2005-02-14
Jan Oberthür
Making a contact to bare ITO
2005-02-15
Kirt Williams
R-reading of bare Au-electrode
Bubphamala, Teerada
2005-02-14
Hello all,

I'm currently working on a gas sensor using  Au electrodes. The electrodes has a
1 um gap with ~0.5 um thick of SiO2 layer underneath. Without adding any
semiconductor layers on top of the electrodes, I've got the R reading changed
relevant to the presence or absence of testing gases, methanol for example.

I don't know how this could happen.I wonder if anyone has the same experience
that can share your idea to me. Any responses would be greatly appreciated.

Terry
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation
Addison Engineering