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MEMSnet Home: MEMS-Talk: Au Target Info
Au Target Info
2005-02-14
Kory Hall
2005-02-15
Brent Garber
Au Target Info
Kory Hall
2005-02-14
Hello.  I have a Varian 3125 Sputtering System and I am trying to get a Gold
target for it.  I was told by some target manufacturers that they usually bond
the gold to another base material such as aluminum because the target is so
large and solid gold would be really expensive.  Does anyone know how thick the
layer of gold should be?  Has anyone experienced this before with a sputtering
target?
Thank you,

Kory Hall

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