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MEMSnet Home: MEMS-Talk: Au Target Info
Au Target Info
2005-02-14
Kory Hall
2005-02-15
Brent Garber
Au Target Info
Brent Garber
2005-02-15
Kory,

I used 8" round gold targets that I indium bonded to water cooled backing
plates.  Depending on how much you are going to use this target will decide how
thick to make it.  Little use, 1/8", lot of use, 1/4" thick.  I also sputtered
Cr/NI/Au on the back side before bonding.

Brent

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