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MEMSnet Home: MEMS-Talk: Re: Deep etching in Si
Re: Deep etching in Si
1998-01-19
Yuping Lin
Re: Deep etching in Si
Yuping Lin
1998-01-19
> Hello:

We need to make a rectangular elastic corrugated membrane (less than 1 mm on
each side), which has a displacement of about 40 micron under a pressure of 300
mmHg.The more tricky part is we need a wall (about 200 micron tall) attached to
the center of the membrane. Anybody can offer advice about the materials,
process, or available facilities? I will really appreciate your help.

Yuping Lin

Tel: (248)960-3523
Fax: (248)960-1814


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