I have accidentally epoxy bonded a silicon chip to a Silicon carbide (bulk)
tool.  I thought someone on the list might know of a way to selectively
remove the epoxy without damaging the silicon carbide part.  Options that I
have access to are as follows...

High temperature in flowing oxygen?  At some temperature the epoxy should
burn off.  Does anyone know what temperature is safe for the SiC in flowing
oxygen?

Oxygen plasma ashing?  Will the Oxygen plasma touch the SiC?

Wet chemistries? Piranha?

This SiC tool will cost ~$2500 to replace, so I am hoping for some sage
advice :-)

Chris