Hi guys,

  I am having trouble with bonding PDMS with glass in an oxygen plasma.  I
am trying to achieve the adhesion with plasma oxidation and application of
pressure for 5 min to seal the PDMS and glass.  The bonding occurs only at
certain spots, if it happens, that is.  I have tried a variety of plasma
conditions: pressure - 75 to 300 mTorr, flow rate- 20 sccm to 50 sccm, time
- 30 seconds to 7 minutes.  I clean the PDMS substrate and the glass slide
with alcohol and blow dry them with N2 gun. I have also tried peeling off
the PDMS from the mold  right before the O2 plasma step and feeding the
PDMS into the plasma.  I have tried using precleaned glass slides. None of
these work.  Maybe I am missing a trick.  I am not sure if there is a
heating step after pressing the PDMS and glass together post oxidation.
Any guidance would be very helpful.

Thanks

Arun.