A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: dryetch Al selectiv to Si
dryetch Al selectiv to Si
2005-02-17
Bill Moffat
2005-02-19
[email protected]
dryetch Al selectiv to Si
[email protected]
2005-02-19
Sorry; the chlorine chemistry used for etching aluminum also etches silicon .
Bob Henderson
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
The Branford Group