Hi Harshal

You may be interested in the standardisation work for Mems/MST thin
films available through ASTM (
http://www.astm.org/cgi-
bin/SoftCart.exe/DATABASE.CART/REDLINE_PAGES/E2244.htm?E+mystore

there is more recent work done on elastic moduli but it's not available
just yet.

Mark

harshal rokade wrote:

>Which is best way to find out mechanical properties of thin fims.
>also how to find the properties such as stiffnes, Young's Modulus
>of cantilevers made of thin films..