Hello,

I am  a french student working on z-cut quartz etching.
I'd like to etch a 500µ (to have a 30µ structure) wafer but I can't
obtain a
good smoothness
(using 48% HF and 40% NH4F at 18°C).

I am looking for information about surfactants used in quartz micromachining
or any other idea which could be usefull

thank you in advance
dubois guillaume