Hi,

I'm trying to determine the material properties of the polysilicon
film (POLY1) of the MUMPs 22 run using the pull-in method of
Gupta & Senturia (MIT).  I am getting very low values for
Young's Modulus (110 GPa).  Biaxial stress is -6MPa.

Compared to Gupta's thesis, I'm getting pull-in voltages of
29V for the 300um beam (compared to 50V by Gupta) and 14V for
a 400um beam (compared to about 25V by Gupta).

I've measured the film thickness (1.96um) and the gap (1.94um).
The dice are placed in the Gel-Pak containers so no vacuum is
applied to the back.

Anyone else measure such values?

Thanks!

+=========+=====================+===================================+
| Edward  | Tel: (650) 723-1482 | CISX 305, Stanford, CA 94305-4075 |
|  Chan   | Fax: (650) 725-7731 |     [email protected]     |
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