A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Bulk etching of silicon
Bulk etching of silicon
2005-02-22
dhanamjaya guda
2005-02-23
Kory Hall
Bulk etching of silicon
dhanamjaya guda
2005-02-22
Hello All,

            I have question regarding silicon etching in 40% KOH
solution.  I am trying to produce v-goorves of 400 micrometer depth
but the silicon di oxide layer is of only 1 micrometer thick which is
not sufficienct enough. Could any one tell why would any one not
prefer to use silicon di oxide layer more than 1 micrometer thick. Are
there any reason that would not allow me to use thicker silicon di
oxide layer. I would really appreciate if any one could mail me back.

Thank you All,
Dhanamjaya R Guda
Louisiana State University.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing