Hi,
we recently got canon Projection Mask Aligner FPA141.  we are setting
it up in our microfabrication lab and  we dont have any vendor manual
to refer for setting it up. I tried calling the canon guys and also
tried it on the internet, I could not find it.

could you please suggest me where i could get the vendor manual for the same.

Thanking you

Ramesh Narayanan
Syracuse University