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MEMSnet Home: MEMS-Talk: How to bound Su-8 below 100degree?
How to bound Su-8 below 100degree?
2005-02-23
Kirkness Jeoffrey
How to bound Su-8 below 100degree?
Kirkness Jeoffrey
2005-02-23
hi everybody,

  Does anyone know how we can bind two wafers, one of which is Si and
has 50micron-high Su-8 patterns on top, under 100 degrees centigrade?
The other wafer is glass, and any easy-to-use bounding chemical, only
if it can keep the surface micron-scale smooth, can be applied if
necessary. I simply want to avoid temperature higher than 100degree in
order to avoid possible damage to the GMR sensors on the Si wafer.

 cheers

reply
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