Hi Annik,

We recently had to do the same exercise in order to investigate O2
permeability of the spun layer.
We had success with the following procedure:
1) Purchase some Teflon sheets and cut them to the diameter of your wafer.
2) Place them over the wafer and smooth out any wrinkles (the electrostatic
force holds in place..even at high spin speeds).
3) Spin coat on the silicone.
4) You can now peel off the teflon silicone sandwich
5) Now, if your patient, you can remove the silicone from the teflon sheet
(it kind of like opening a produce bag at the market;)

It sounds lame...but it works.

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